Patent · US Expired

Focusing-device for the radiation from a light source

US7410265B2 · kind B2 · utility

6Cited by

9References

50Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Martin Antoni · Aalen, DE
Frank Melzer · Utzmemmingen, DE
Andreas Seifert · Aalen, DE
Wolfgang Singer · Aalen, DE
Wilhelm Egle · Aalen, DE
Bernhard Gellrich · Aalen, DE
Bernhard Geuppert · Lauchheim, DE

Key dates

Filing date	Sep 30, 2003
Grant date	Aug 12, 2008
Priority date	—
Expiry date	Sep 30, 2023

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70175
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A focusing-device for the radiation from a light source (2) is provided with a collector mirror (1, 1′) which is arranged in a mount (24) and collects the light, in virtual or real terms, from the light source (2) at the second focus (200). The collector mirror (1, 1′) is displaceably connected to the mount (24) via a bearing in such a way that its optical properties remain at least approximately the same even in the event of temperature changes.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.