Vertical type nanotube semiconductor device
US7411241B2 · kind B2 · utility
13Cited by
5References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 5, 2006 |
| Grant date | Aug 12, 2008 |
| Priority date | — |
| Expiry date | Jun 29, 2026 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/938
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A vertical type nanotube semiconductor device including a nanotube bit line, disposed on a substrate and in parallel with the substrate and composed of a nanotube with a conductive property, and a nanotube pole connected to the bit line vertically to the substrate and provides a channel through which carriers migrate. By manufacturing the semiconductor device using the bit line composed of the nanotube, cutoff of an electrical connection of the bit line is prevented and an integration density of the semiconductor device can be improved.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.