Method and apparatus for the automated process of in-situ lift-out
US7414252B2 · kind B2 · utility
23Cited by
33References
65Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 3, 2005 |
| Grant date | Aug 19, 2008 |
| Priority date | — |
| Expiry date | Feb 5, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/31745
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus for performing automated in-situ lift-out of a sample from a specimen includes a computer having a memory with computer-readable instructions, a stage for a specimen and a nano-manipulator. The stage and the nano-manipulator are controlled by motion controllers connected to the computer. The nano-manipulator has a probe tip for attachment to samples excised from the specimen. The computer-readable instructions include instructions to cause the stage motion controllers and the nano-manipulator motion controllers, as well as an ion-beam source, to automatically perform in-situ lift-out of a sample from the specimen.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.