Slit coater
US7416758B2 · kind B2 · utility
3Cited by
11References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 19, 2005 |
| Grant date | Aug 26, 2008 |
| Priority date | — |
| Expiry date | Sep 7, 2025 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB05B15/65
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A slit coater including buffer members having elasticity and installed at both sides of a slit nozzle unit, compensating for a height difference between both sides, preventing breakdown due to excessive stress generated by the height, and reducing set-up time. The slit coater includes: a table on which an object to be processed is mounted; a slit nozzle unit formed above the table for applying coating solution onto the object; a driving unit moving the slit nozzle unit in a predetermined direction; and buffer members having elasticity installed at both sides of the slit nozzle unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.