Stage assembly with measurement system initialization, vibration compensation, low transmissibility, and lightweight fine stage

US7417714B2 · kind B2 · utility

Assignee

• NIKON CORPORATION · JP

Inventors

• Michael Binnard · Belmont, US
• Wen-Hou Ma · Novi, US
• Toshio Ueta · Gyōda, JP
• Pai-Hsueh Yang · Palo Alto, US
• Ting-Chien Teng · Fremont, US
• Bausan Yuan · San Jose, US

Key dates

• Filing date: Oct 24, 2005
• Grant date: Aug 26, 2008
• Expiry date: Aug 1, 2026

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/709
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A stage assembly (220) that moves a work piece (200) about a first axis and along a first axis includes a first stage (238), a second stage (240) that retains the work piece (200), a second mover assembly (244), a measurement system, and an initialization system (1081A). The second mover assembly (244) moves the second stage (240) relative to the first stage (238) about the first axis. The measurement system (22) monitors the position of the second stage (240) about the first axis when the second stage (240) is positioned within a working range about the first axis. The initialization system (1081A) facilitates movement of the second stage (240) about the first axis when the second stage (240) is rotated about the first axis outside the working range. The second mover assembly (244) can include a mover (255) and a dampener (410) that reduces the transmission of vibration from the first stage (238) to the second stage (240). In addition, the stage assembly (220) can include a control system (24) that directs power to the mover (255) to position the second stage (240) and to compensate for vibration of the first stage (238).