Kinematic coupling with textured contact surfaces

US7422107B2 · kind B2 · utility

Assignee

• ENTEGRIS, INC. · US

Inventors

• John Burns · Colorado Springs, US
• Martin L. Forbes · Divide, US
• Matthew A. Fuller · Colorado Springs, US
• Jeffery J. King · Cocoa, US
• Mark V. Smith · Colorado Springs, US

Key dates

• Filing date: Jan 25, 2006
• Grant date: Sep 9, 2008
• Expiry date: Mar 11, 2027

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S414/14
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

A substrate kinematic coupling or guide plate for a substrate carrier having textured or patterned surfaces at the points of contact to reduce frictional forces generated between automated processing equipment and the kinematic coupling. The textured surface reduces the contact area between the processing equipment and the contact portion of the kinematic coupling, thereby reducing the resultant frictional force. By reducing the frictional force, the substrate carrier more readily settles on the mounting pins of the processing equipment, thus avoiding intolerable height and angular deviations during automated access to the substrates. Textures include, but are not limited to, a knurl pattern, ridges running laterally along the contact portions, and ridges running longitudinally along the contact portions. The textures may be formed by a blow molding, injection molding or in an overmolding process, or by a machining or imprinting process.