Atomic force microscope
US7423264B2 · kind B2 · utility
0Cited by
13References
30Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 8, 2006 |
| Grant date | Sep 9, 2008 |
| Priority date | — |
| Expiry date | Nov 21, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q70/02
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In one embodiment, an atomic force microscope comprises a frame, a beam coupled to the frame at a first end and a second end, a probe mounted to the beam, means for inducing relative motion between the beam and an underlying surface, and means for detecting a characteristic of the beam.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.