Applying a self-adaptive filter to a drifting process

US7424392B1 · kind B1 · utility

Assignee

• Advanced Micro Devices, Inc. · US

Inventors

• Jin Wang · Austin, US
• Robert J. Chong · Austin, US
• Christopher A. Bode · Austin, US
• Si QIN · Los Angeles, US
• Alexander J. Pasadyn · Austin, US

Key dates

• Filing date: Dec 18, 2002
• Grant date: Sep 9, 2008
• Expiry date: Apr 12, 2025

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y02P90/02
• WIPO field: Control
• WIPO sector: Instruments

Abstract

A method and an apparatus are provided for applying a self-adaptive filter to a drifting process. The method includes processing a workpiece, measuring an output characteristic of the processed workpiece and modifying a previous estimated process state based at least on the measured output characteristic. The method further includes estimating a next process state based at least on the modified previous estimated process state.