Large collection angle x-ray monochromators for electron probe microanalysis
US7427757B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 5, 2005 |
| Grant date | Sep 23, 2008 |
| Priority date | — |
| Expiry date | Oct 11, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2561
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
X-ray monochromators and electron probe micro-analysis (EPMA) systems using such monochromators are disclosed. A turretless x-ray monochromator may have a cassette of reflectors instead of a turret. The cassette stores a plurality of reflectors that can be inserted into a conventional Rowland circle monochromator geometry. A transfer mechanism selectively moves reflectors from the cassette to a reflector positioner. The use of the cassette allows each reflector to be placed closer to a source of x-rays, thereby allowing a larger solid angle for x-ray collection. An alternative x-ray monochromator uses a non-focusing reflector that can be fixed, scanned axially or scanned radially to provide large solid angle detection of x-rays at various energies with a single reflector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.