Patent · US Expired

Active wafer probe

US7427868B2 · kind B2 · utility

30Cited by

712References

5Claims

0Family size

Assignee

Cascade Microtech, Inc. · US

Inventors

Eric W. Strid · Portland, US
K. Reed Gleason · Portland, US

Key dates

Filing date	Dec 21, 2004
Grant date	Sep 23, 2008
Priority date	—
Expiry date	Dec 21, 2024

Classification

Technology area (CPC G)Physics
CPC primaryG01R1/06772
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A probe suitable for probing a semiconductor wafer that includes an active circuit. The probe may have a rigid probing member and include a flexible interconnection between the active circuit and a support structure. The active circuit may have a relatively low capacitance as seen by the device under test.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.