Patent · US Active

Semiconductor device comprising a transistor having a counter-doped channel region and method for forming the same

US7432164B2 · kind B2 · utility

4Cited by
11References
17Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 27, 2006
Grant dateOct 7, 2008
Priority date
Expiry dateOct 2, 2026

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D84/0177

Abstract

A method for making a semiconductor device includes providing a first substrate region and a second substrate region, wherein at least a part of the first substrate region has a first conductivity type and at least a part of the second substrate region has a second conductivity type different from the first conductivity type. The method further includes forming a dielectric layer over at least a portion of the first substrate region and at least a portion of the second substrate region. The method further includes forming a metal-containing gate layer over at least a portion of the dielectric layer overlying the first substrate region. The method further includes introducing dopants into at least a portion of the first substrate region through the metal-containing gate layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.