Patent · US Expired

Semiconductor device including a MOSFET having a band-engineered superlattice with a semiconductor cap layer providing a channel

US7435988B2 · kind B2 · utility

107Cited by
32References
37Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 25, 2005
Grant dateOct 14, 2008
Priority date
Expiry dateSep 24, 2025

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D84/038

Abstract

A semiconductor device may include a substrate and at least one MOSFET adjacent the substrate including a superlattice. The superlattice may include a plurality of stacked groups of layers and a semiconductor cap layer on an uppermost group of layers. Each group of layers of the superlattice may comprise a plurality of stacked base semiconductor monolayers defining a base semiconductor portion and at least one non-semiconductor monolayer constrained within a crystal lattice of adjacent base semiconductor portions. The MOSFET may further include source, drain, and gate regions defining a channel through at least a portion of the semiconductor cap layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.