Inventor · Brookline, MA, US

Marek Hytha

69Patents
35h-index
14Co-inventors
85Inventor score

Filing activity: Aug 22, 2003 → Jun 20, 2024

Most-cited inventions

PatentTitleAreaCited byStatus
US6830964B1 Method for making semiconductor device including band-engineered superlattice Electricity 121 Expired
US6833294B1 Method for making semiconductor device including band-engineered superlattice Electricity 119 Expired
US7517702B2 Method for making an electronic device including a poled superlattice having a net electrical dipole moment Electricity 117 Active
US6897472B2 Semiconductor device including MOSFET having band-engineered superlattice Electricity 116 Expired
US7446002B2 Method for making a semiconductor device comprising a superlattice dielectric interface layer Electricity 115 Expired
US6891188B2 Semiconductor device including band-engineered superlattice Electricity 111 Expired
US7625767B2 Methods of making spintronic devices with constrained spintronic dopant Electricity 110 Active
US7034329B2 Semiconductor device including band-engineered superlattice having 3/1-5/1 germanium layer structure Electricity 109 Expired
US6927413B2 Semiconductor device including band-engineered superlattice Electricity 109 Expired
US6878576B1 Method for making semiconductor device including band-engineered superlattice Electricity 109 Expired
US7700447B2 Method for making a semiconductor device comprising a lattice matching layer Electricity 109 Active
US7880161B2 Multiple-wavelength opto-electronic device including a superlattice Emerging Cross-Sectional Technologies 109 Active
US6958486B2 Semiconductor device including band-engineered superlattice Electricity 109 Expired
US7153763B2 Method for making a semiconductor device including band-engineered superlattice using intermediate annealing Emerging Cross-Sectional Technologies 109 Expired
US7071119B2 Method for making a semiconductor device including band-engineered superlattice having 3/1-5/1 germanium layer structure Electricity 108 Expired
US6952018B2 Semiconductor device including band-engineered superlattice Electricity 108 Expired
US7033437B2 Method for making semiconductor device including band-engineered superlattice Electricity 107 Expired
US7265002B2 Method for making a semiconductor device including a MOSFET having a band-engineered superlattice with a semiconductor cap layer providing a channel Electricity 107 Expired
US7435988B2 Semiconductor device including a MOSFET having a band-engineered superlattice with a semiconductor cap layer providing a channel Electricity 107 Expired
US7303948B2 Semiconductor device including MOSFET having band-engineered superlattice Electricity 107 Expired
US8389974B2 Multiple-wavelength opto-electronic device including a superlattice Emerging Cross-Sectional Technologies 106 Active
US7863066B2 Method for making a multiple-wavelength opto-electronic device including a superlattice Emerging Cross-Sectional Technologies 106 Active
US7718996B2 Semiconductor device comprising a lattice matching layer Electricity 106 Active
US10109479B1 Method of making a semiconductor device with a buried insulating layer formed by annealing a superlattice Electricity 65 Active
US10170603B2 Semiconductor device including a resonant tunneling diode structure with electron mean free path control layers Electricity 57 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.