Computer-implemented methods and systems for determining a configuration for a light scattering inspection system
US7436505B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 4, 2006 |
| Grant date | Oct 14, 2008 |
| Priority date | — |
| Expiry date | Apr 5, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/9501
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Computer-implemented methods and systems for determining a configuration for a light scattering inspection system are provided. One computer-implemented method includes determining a three-dimensional map of signal-to-noise ratio values for data that would be acquired for a specimen and a potential defect on the specimen by the light scattering inspection system across a scattering hemisphere of the inspection system. The method also includes determining one or more portions of the scattering hemisphere in which the signal-to-noise ratio values are higher than in other portions of the scattering hemisphere based on the three-dimensional map. In addition, the method includes determining a configuration for a detection subsystem of the inspection system based on the one or more portions of the scattering hemisphere.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.