Method and system for operating an air gauge at programmable or constant standoff
US7437911B2 · kind B2 · utility
5Cited by
11References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 15, 2004 |
| Grant date | Oct 21, 2008 |
| Priority date | — |
| Expiry date | Dec 15, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F9/7088
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Provided are a method and system for measuring a distance to an object. The system includes an air gauge configured to sense a distance to a surface of the object and a sensor configured to measure at least one from the group including (i) a relative position of the air gauge and (ii) a relative position of the surface of the object. Outputs of the air gauge and the sensor are combined to produce a combined air gauge reading.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.