Patent · US Active

On-wafer test structures for differential signals

US7443186B2 · kind B2 · utility

10Cited by

959References

18Claims

0Family size

Assignee

Cascade Microtech, Inc. · US

Inventors

Eric W. Strid · Portland, US
Richard Campbell · Medicine Hat, CA

Key dates

Filing date	Mar 9, 2007
Grant date	Oct 28, 2008
Priority date	—
Expiry date	Mar 9, 2027

Classification

Technology area (CPC G)Physics
CPC primaryG01R31/2884
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A test structure for characterizing integrated circuits on a wafer includes a differential cell outputting a differential mode signal in response to a differential mode input signal. The probe pads of the test structure are arrayed linearly enabling placement of the test structure in a saw street between dies.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.