Patent · US Active

Optical element holding apparatus, exposure apparatus and device manufacturing method

US7443619B2 · kind B2 · utility

10Cited by

9References

8Claims

0Family size

Assignee

Canon Kabushiki Kaisha · JP

Inventors

Shigeo Sakino · Higashimurayama, JP
Hirohito Ito · Utsunomiya, JP
Shinji Uchida · Matsumoto, JP
Choshoku Sai · Yokohama, JP
Katsumi Asada · Yokohama, JP

Key dates

Filing date	Sep 19, 2006
Grant date	Oct 28, 2008
Priority date	—
Expiry date	Sep 19, 2026

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70825
WIPO fieldOptics
WIPO sectorInstruments

Abstract

At least one exemplary embodiment is directed to an optical element holding apparatus including a force generating actuator configured to deform the optical element, a measuring device configured to measure a position of the optical element, and a displacement causing actuator configured to position the optical element based on the measured position.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.