Method and apparatus for measuring high-bandwidth electrical signals using modulation in an optical probing system
US7450245B2 · kind B2 · utility
19Cited by
68References
32Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 17, 2006 |
| Grant date | Nov 11, 2008 |
| Priority date | — |
| Expiry date | May 17, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/308
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system for probing a DUT is provided, the system comprising a tunable or CW laser source, a modulator for modulating the output of the laser source, a beam optics designed to point a probing beam at a designated location on the DUT, optical detector for detecting the reflected beam, and collection and signal processing electronics. The system deciphers perturbations in the reflected beam by detecting beat frequency between operation frequency of the DUT and frequency of the modulation. In an alternative embodiment, the laser is CW and the modulation is applied to the optical detector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.