Vaporizer
US7452424B2 · kind B2 · utility
8Cited by
8References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 27, 2005 |
| Grant date | Nov 18, 2008 |
| Priority date | — |
| Expiry date | May 21, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67109
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A vaporizer for generating a process gas from a gas-liquid mixture fluid includes a container defining a process space of the vaporizer. A supply head having a plurality of spray holes to spray the fluid is disposed within the container. A heating passage is disposed below the spray holes within the container. The heating passage is configured to heat the fluid passing therethrough and thereby generate the process gas. A gas delivery passage is connected to the container to laterally deliver the process gas from below the heating passage. A mist receiver is provided at the container below the gas delivery passage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.