Tsuneyuki Okabe
35Patents
8h-index
62Co-inventors
78Inventor score
Filing activity: Mar 9, 2001 → Nov 22, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7726333B2 | Fluid controller | Emerging Cross-Sectional Technologies | 42 | Expired |
| US6382238B2 | Fluid control apparatus | Emerging Cross-Sectional Technologies | 19 | Expired |
| US8944095B2 | Gas supply apparatus for semiconductor manufacturing apparatus | Emerging Cross-Sectional Technologies | 13 | Active |
| US6814572B2 | Heat treating method and heat treating device | Electricity | 9 | Expired |
| US8973615B2 | Fluid control device | Emerging Cross-Sectional Technologies | 9 | Expired |
| US7883076B2 | Semiconductor processing system and vaporizer | Emerging Cross-Sectional Technologies | 8 | Active |
| US7547003B2 | Vaporizing apparatus and semiconductor processing system | Emerging Cross-Sectional Technologies | 8 | Active |
| US7452424B2 | Vaporizer | Electricity | 8 | Expired |
| US8219329B2 | Thermal type mass flow meter, and thermal type mass flow control device | Physics | 6 | Active |
| US7510884B2 | Semiconductor production system and semiconductor production process | Physics | 4 | Expired |
| US7874316B2 | Purge gas unit and purge gas supply integrated unit | Emerging Cross-Sectional Technologies | 4 | Active |
| US8104516B2 | Gas supply unit and gas supply system | Emerging Cross-Sectional Technologies | 4 | Active |
| US8371334B2 | Rotary switching valve | Emerging Cross-Sectional Technologies | 4 | Active |
| US8382903B2 | Vaporizer and semiconductor processing system | Chemistry; Metallurgy | 4 | Active |
| US7682843B2 | Semiconductor fabrication system, and flow rate correction method and program for semiconductor fabrication system | Chemistry; Metallurgy | 4 | Active |
| US7343926B2 | Liquid raw material supply unit for vaporizer | Emerging Cross-Sectional Technologies | 3 | Active |
| US8197600B2 | Vaporizer and semiconductor processing system | Chemistry; Metallurgy | 3 | Active |
| US10287682B2 | Substrate processing apparatus, gas supply method, substrate processing method, and film forming method | Chemistry; Metallurgy | 2 | Active |
| US8851106B2 | Gas supplying apparatus, cylinder cabinet provided with the same, valve box, and substrate process apparatus | Emerging Cross-Sectional Technologies | 2 | Active |
| US9435470B2 | Pipe joint | Mechanical Engineering; Lighting; Heating | 2 | Active |
| US7954452B2 | Film formation apparatus for semiconductor process and method for using the same | Electricity | 2 | Active |
| US8893743B2 | Flow rate controller and processing apparatus | Emerging Cross-Sectional Technologies | 1 | Active |
| US11255468B2 | Gasket for fluid coupling, and fluid coupling | Mechanical Engineering; Lighting; Heating | 1 | Active |
| US9159548B2 | Semiconductor processing system including vaporizer and method for using same | Chemistry; Metallurgy | 1 | Active |
| US11402124B2 | Fluid heater, fluid control apparatus, and production method for fluid heater | Electricity | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.