Reflecting mirror and exposure apparatus using the same
US7453623B2 · kind B2 · utility
1Cited by
7References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 21, 2006 |
| Grant date | Nov 18, 2008 |
| Priority date | — |
| Expiry date | Apr 21, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70266
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A mirror apparatus including a reflecting mirror reflecting light, partition walls, the walls and the reflecting mirror defining a plurality of air chambers, and a regulator regulating air pressure in at least one of the air chambers. With this configuration, the front surface of the reflecting mirror is deformed into a smooth shape so as to correct optical aberration.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.