Stacked capacitor array and fabrication method for a stacked capacitor array

US7456461B2 · kind B2 · utility

Assignee

• Infineon Technologies AG · DE

Inventors

• Martin Gutsche · Dorfen, DE
• Harald Seidl · Brandenburg an der Havel, DE
• Peter Moll · Dresden, DE

Key dates

• Filing date: Apr 22, 2005
• Grant date: Nov 25, 2008
• Expiry date: Jun 7, 2026

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10B12/315

Abstract

The present invention relates to a stacked capacitor array and a fabrication method for a stacked capacitor array having a multiplicity of stacked capacitors, an insulator keeping at least two adjacent stacked capacitors mutually spaced apart, so that no electrical contact can arise between them and the stacked capacitors are mechanically stabilized.