Stage apparatus, lithographic apparatus and device manufacturing method
US7459701B2 · kind B2 · utility
7Cited by
19References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 8, 2005 |
| Grant date | Dec 2, 2008 |
| Priority date | — |
| Expiry date | Nov 16, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/707
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A stage apparatus for displacing an object having a substantially flat surface is described. The apparatus includes an object table for supporting the object and a positioning device for displacing the object table in a first direction. The apparatus further includes a clamping device for clamping the object to the object table by a first clamping force, the first clamping force being controlled by an electronic control unit based upon a state of the object.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.