Peter Schaap
4Patents
3h-index
29Co-inventors
50Inventor score
Filing activity: Jun 8, 2005 → Apr 24, 2015
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7459701B2 | Stage apparatus, lithographic apparatus and device manufacturing method | Physics | 7 | Active |
| US7724351B2 | Lithographic apparatus, device manufacturing method and exchangeable optical element | Physics | 6 | Active |
| US7440076B2 | Lithographic apparatus, device manufacturing method and device manufactured thereby | Physics | 3 | Active |
| US9983489B2 | Method for compensating for an exposure error, a device manufacturing method, a substrate table, a lithographic apparatus, a control system, a method for measuring reflectivity and a method for measuring a dose of EUV radiation | Physics | 3 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.