Mass flow verifiers capable of providing different volumes, and related methods
US7461549B1 · kind B1 · utility
16Cited by
6References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 27, 2007 |
| Grant date | Dec 9, 2008 |
| Priority date | — |
| Expiry date | Jun 27, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F25/17
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Embodiments of the present disclosure are directed to systems, methods, and apparatus, including software implementation, useful for high-precision measurement of mass flow rate over a large range of flows by using multiple volumes, each having a different and selected size. Use of a single manometer can facilitate reduced cost, and the use of multiple chamber volumes that are sized according to sub-flow ranges within the overall range of the mass flow verifier, or a related device under test, can provide high accuracy while reducing deleterious effects of noise in the flow measurement.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.