Patent · US Expired

Detector for variable pressure areas and an electron microscope comprising a corresponding detector

US7462839B2 · kind B2 · utility

14Cited by

6References

24Claims

0Family size

Assignee

Carl Zeiss NTS GmbH · US

Inventors

Peter Gnauck · Reutlingen, DE
Volker Drexel · Oberkochen, DE
David Bate · Künzelsau, DE
Eric Essers · Aalen, DE

Key dates

Filing date	Jun 29, 2001
Grant date	Dec 9, 2008
Priority date	—
Expiry date	Sep 15, 2021

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/244
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A detector for scanning electron microscopes, which can be used under different pressure conditions in the specimen chamber of the electron microscope, designed for the detection of both electrons and light. For this purpose, the detector has a photodetector and a scintillator of a material transmissive for visible light connected before the photodetector. The scintillator can be provided with a coating transparent to visible light. By the application of different potentials, the detector is suitable for the detection of electrons in high vacuum and for the detection of light with high pressures in the specimen chamber.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.