Recessed termination for trench schottky device without junction curvature
US7466005B2 · kind B2 · utility
4Cited by
1References
3Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 11, 2005 |
| Grant date | Dec 16, 2008 |
| Priority date | — |
| Expiry date | Jun 23, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D62/106
Abstract
A trench type Schottky device has a guard ring diffusion of constant depth between the outermost of an active trench and an outer surrounding termination trench. The junction curvature of the guard ring diffusion is suppressed or cut out by the trenches.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.