Rotating compensator ellipsometer system with spatial filter equivalent
US7468794B1 · kind B1 · utility
8Cited by
32References
29Claims
0Family size
Assignee
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Key dates
| Filing date | Aug 15, 2005 |
| Grant date | Dec 23, 2008 |
| Priority date | — |
| Expiry date | May 26, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/55
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Application of a spatial filter equivalent constructed from a converging lens and an optical fiber in rotating compensator ellipsometer systems, after a sample system. The purpose is to eliminate a radially outer annulus of a generally arbitrary Profile beam that presents with low intensity level irregular content, so that electromagnetic beam intensity is caused to quickly decay to zero as a function of radius.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.