Patent · US Active

Apparatus and method for a scanning probe microscope

US7473894B2 · kind B2 · utility

1Cited by

3References

22Claims

0Family size

Assignee

JPK INSTRUMENTS AG · DE

Inventors

Detlef Knebel · Berlin, DE
Torsten Jähnke · Berlin, DE
Olaf Sünwoldt · Berlin, DE

Key dates

Filing date	Mar 20, 2006
Grant date	Jan 6, 2009
Priority date	—
Expiry date	Apr 24, 2027

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10S977/868
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

The invention relates to an apparatus and a method for a scanning probe microscope, comprising a measuring assembly which includes a lateral shifting unit to displace a probe in a plane, a vertical shifting unit to displace the probe in a direction perpendicular to the plane, and a specimen support to receive a specimen. A condenser light path is formed through the measuring assembly so that the specimen support is located in the area of an end of the condenser light path.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.