Apparatus and methods for precompiling program sequences for wafer processing
US7477948B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 6, 2006 |
| Grant date | Jan 13, 2009 |
| Priority date | — |
| Expiry date | Jul 21, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B2219/45031
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
Disclosed are apparatus and methods for embodiments for efficiently and flexibly controlling hardware devices in a semiconductor processing system are provided for use in a distributed control arrangement. In general, the distributed arrangement includes at least one upper-level controller that is configurable with a computer program sequence of instructions for controlling one or more hardware devices of a processing tool. The hardware devices are controlled through one or more lower-level controllers. Prior to execution of the program sequence of the upper-level controller, at least one instruction of this program is pre-compiled so as to translate the instruction for execution by a selected lower-level controller and to add an at least one interlock check to such pre-compiled instruction and make the translated instruction accessible to at least one lower-level controller. The interlock check specifies one or more condition(s) for the selected lower-level controller to execute the pre-compiled instruction. Any number of instructions of the upper-level controller may be translated for use by any number of selected lower-level controllers, where some of the translated instructions…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.