Steve Kleinke
6Patents
3h-index
9Co-inventors
46Inventor score
Filing activity: Nov 5, 1999 → May 20, 2013
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6405101B1 | Wafer centering system and method | Electricity | 77 | Expired |
| US8444364B2 | Auto-sequencing multi-directional inline processing apparatus | Emerging Cross-Sectional Technologies | 9 | Active |
| US8672603B2 | Auto-sequencing inline processing apparatus | Emerging Cross-Sectional Technologies | 4 | Active |
| US9287152B2 | Auto-sequencing multi-directional inline processing method | Emerging Cross-Sectional Technologies | 3 | Active |
| US7477948B1 | Apparatus and methods for precompiling program sequences for wafer processing | Physics | 2 | Active |
| US8082044B2 | Apparatus and methods for precompiling program sequences processing for wafer processing | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.