Patent · US Active

Multi mode inspection method and apparatus

US7480039B2 · kind B2 · utility

0Cited by

1References

12Claims

0Family size

Assignee

Negevtech, Ltd. · IL

Inventors

Dov Furman · Rehovot, IL
Noam Dotan · Givatayim, IL
Efraim Miklatzky · Neve Ilan, IL

Key dates

Filing date	Aug 22, 2007
Grant date	Jan 20, 2009
Priority date	—
Expiry date	Aug 22, 2027

Classification

Technology area (CPC G)Physics
CPC primaryG01N2021/8825
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

An inspection system for inspecting an object, the system comprising an illuminator including at least one pulsed light source, a detector assembly, and a relative motion provider operative to provide motion of the object relative to the detector assembly, alone an axis of motion, the detector assembly comprising a plurality of 2-dimensional detector units whose active areas are arranged at intervals.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.