Multiple angle of incidence spectroscopic scatterometer system
US7483133B2 · kind B2 · utility
16Cited by
19References
21Claims
0Family size
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Key dates
| Filing date | Mar 11, 2005 |
| Grant date | Jan 27, 2009 |
| Priority date | — |
| Expiry date | Apr 9, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/211
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Techniques for optimizing the sensitivity of spectroscopic measurement techniques with respect to certain profile variables by selecting desired measurement angles since the measurement sensitivity to each variable depends, at least in part, on the measurement angles of an incident beam. The selected desired set of measurement angles includes both an azimuth angle and a polar angle. Optimizing the sensitivity of spectroscopic measurement techniques can also reduce or eliminates measurement correlation among variable to be measured.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.