Method and system for determining utilization of process tools in a manufacturing environment based on characteristics of an automated material handling system
US7487002B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jan 16, 2007 |
| Grant date | Feb 3, 2009 |
| Priority date | — |
| Expiry date | Sep 26, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
By determining a metric for tool utilization in a manufacturing environment on the basis of tool-specific characteristics and a probability distribution for the transport capability of an automated material handling system, the influence of the transport system on the tool performance may be effectively determined. For this purpose, an average delay caused by the automated material handling system may be iteratively calculated on the basis of a respective required carrier exchange time, which depends on tool- and process-specific characteristics. From the corresponding average delay, an appropriate metric, such as a utilization loss factor, may be determined.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.