Inventor · Dresden, DE

Kilian Schmidt

7Patents
2h-index
3Co-inventors
36Inventor score

Filing activity: Jan 3, 2007 → Jan 20, 2012

Most-cited inventions

PatentTitleAreaCited byStatus
US7567851B2 Method and system for dynamically changing the transport sequencing in a cluster tool Emerging Cross-Sectional Technologies 6 Active
US7571020B2 Method and system for controlling process tools by interrupting process jobs depending on job priority Emerging Cross-Sectional Technologies 4 Active
US7487002B2 Method and system for determining utilization of process tools in a manufacturing environment based on characteristics of an automated material handling system Emerging Cross-Sectional Technologies 2 Active
US8504186B2 Method for automatic generation of throughput models for semiconductor tools Physics 2 Active
US8798778B2 Method and system for synchronizing chamber down times by controlling transport sequencing in a process tool Emerging Cross-Sectional Technologies 2 Active
US8170704B2 Method and system for automatic generation of throughput models for semiconductor tools Physics 1 Active
US8126588B2 Method and system for controlling transport sequencing in a process tool by a look-ahead mode Emerging Cross-Sectional Technologies 1 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.