Kilian Schmidt
7Patents
2h-index
3Co-inventors
36Inventor score
Filing activity: Jan 3, 2007 → Jan 20, 2012
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7567851B2 | Method and system for dynamically changing the transport sequencing in a cluster tool | Emerging Cross-Sectional Technologies | 6 | Active |
| US7571020B2 | Method and system for controlling process tools by interrupting process jobs depending on job priority | Emerging Cross-Sectional Technologies | 4 | Active |
| US7487002B2 | Method and system for determining utilization of process tools in a manufacturing environment based on characteristics of an automated material handling system | Emerging Cross-Sectional Technologies | 2 | Active |
| US8504186B2 | Method for automatic generation of throughput models for semiconductor tools | Physics | 2 | Active |
| US8798778B2 | Method and system for synchronizing chamber down times by controlling transport sequencing in a process tool | Emerging Cross-Sectional Technologies | 2 | Active |
| US8170704B2 | Method and system for automatic generation of throughput models for semiconductor tools | Physics | 1 | Active |
| US8126588B2 | Method and system for controlling transport sequencing in a process tool by a look-ahead mode | Emerging Cross-Sectional Technologies | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.