Method and apparatus to help promote contact of gas with vaporized material

US7487956B2 · kind B2 · utility

Assignee

• ADVANCED TECHNOLOGY & MATERIALS CO., LTD. · US

Inventors

• John N. Gregg · Marble Falls, US
• Scott L. Battle · Cedar Park, US
• Jeffrey I. Banton · Burnet, US
• Donn K. Naito · Marble Falls, US
• Ravi Laxman · San Jose, US

Key dates

• Filing date: Oct 30, 2007
• Grant date: Feb 10, 2009
• Expiry date: Oct 30, 2027

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S261/65
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

Vaporizable material is supported within a vessel to promote contact of an introduced gas with the vaporizable material, and produce a product gas including vaporized material. A heating element supplies heat to a wall of the vessel to heat vaporizable material disposed therein. The vessel may include an amoule having a removable top. Multiple containers defining multiple material support surfaces may be stacked disposed within a vessel in thermal communication with the vessel. A tube may be disposed within the vessel and coupled to a gas inlet. Filters, flow meters, and level sensors may be further provided. Product gas resuting from contact of introduced gas with vaporized material may be delivered to atomic layer deposition (ALD) or similar process equipment.