Enhanced simultaneous multi-spot inspection and imaging
US7489393B2 · kind B2 · utility
14Cited by
13References
36Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 2, 2005 |
| Grant date | Feb 10, 2009 |
| Priority date | — |
| Expiry date | May 6, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/8806
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system and method for inspection is disclosed. The design includes focusing illumination beams of radiation at an optical axis to an array of illuminated elongated spots on the surface at oblique angle(s) of incidence to the surface, performing a linear scan along a linear axis, wherein the linear axis is offset from the optical axis by a not insubstantial angular quantity, and imaging scattered radiation from the spots onto an array of receivers so that each receiver in the array receives scattered radiation from a corresponding spot in the array of spots.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.