Discrete polarization state spectroscopic ellipsometer system and method of use

US7492455B1 · kind B1 · utility

Assignee

• J.A. WOOLLAM CO., INC. · US

Inventors

• Blaine D. Johs · Lincoln, US
• Martin M. Liphardt · Lincoln, US
• Ping He · Lincoln, US
• Jeffrey S. Hale · Lincoln, US

Key dates

• Filing date: Jul 10, 2006
• Grant date: Feb 17, 2009
• Expiry date: Jun 6, 2027

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N2021/213
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A spectroscopic ellipsometer system comprising a plurality of individual sources which are sequentially energized to provide a sequence of beams, each of different polarization state but directed along a common locus toward a sample. The preferred spectroscopic ellipsometer system has no parts which move during data collection, and it provides a progressive plurality of sequentially discrete, rather than continuously varying, polarization states.