High throughput multi beam detection system and method
US7504622B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 12, 2007 |
| Grant date | Mar 17, 2009 |
| Priority date | — |
| Expiry date | Sep 18, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2446
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A high-throughput inspection system and method. The system includes: (i) a charged particles to light converter adapted to convert a secondary array of charged particle beams to a first array of light beams; wherein the first array of light beams is characterized by a first ratio of an average first array light beam diameter to an average distance between adjacent first array light beams of the first array; (ii) first optics, positioned between the charged particles to light converter and between inputs of multiple fibers, wherein the first optics is adapted to provide a second array of light beams; wherein each second array light beam corresponds to a first array light beam; wherein the second array of light beams is characterized by a second ratio of an average second array light beam diameter to an average distance between adjacent second array light beams; wherein the second ratio is substantially smaller than the first ratio; (iii) multiple fibers that are adapted to direct second array light beams towards multiple detectors; wherein the inputs of the multiple fibers are positioned in response to an expected spatial disorder of the second array of light beams and to diameters …
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.