Method of inspecting articles using imaging inspection apparatus with directional cooling
US7510324B2 · kind B2 · utility
9Cited by
20References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 2, 2007 |
| Grant date | Mar 31, 2009 |
| Priority date | — |
| Expiry date | Aug 2, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2223/419
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of inspecting articles using an imaging inspection apparatus which utilizes a plurality of individual imaging devices for directing beams onto the articles having objects therein to detect the objects based on established criteria. The method involves the enhanced cooling of the heat-generating imaging devices in which a fan directs cooling fluid onto a plurality of deflectors which in turn direct said fluid onto selected ones of said imaging devices.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.