Scanning electron microscope
US7511271B2 · kind B2 · utility
5Cited by
6References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 21, 2005 |
| Grant date | Mar 31, 2009 |
| Priority date | — |
| Expiry date | Aug 14, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2806
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A scanning electron microscope includes an irradiation optical system for irradiating an electron beam to a sample; a sample holder for supporting the sample, arranged inside a sample chamber; at least one electric field supply electrode arranged around the sample holder; and an ion current detection electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.