Ion sources, systems and methods
US7511279B2 · kind B2 · utility
19Cited by
55References
112Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 15, 2006 |
| Grant date | Mar 31, 2009 |
| Priority date | — |
| Expiry date | Aug 4, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/31755
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Ion sources, systems and methods are disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.