Patent · US Active

Electron anti-fogging baffle used as a detector

US7514682B2 · kind B2 · utility

1Cited by

4References

20Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Benyamin Buller · Cupertino, US
William J. DeVore · Hayward, US
Juergen Frosien · Ottobrunn, DE
Richard L. Lozes · Pleasanton, US
Henry Pearce-Percy · Los Gatos, US
Dieter Winkler · Munich, DE

Key dates

Filing date	Sep 29, 2006
Grant date	Apr 7, 2009
Priority date	—
Expiry date	Apr 1, 2027

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/24571
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

Methods and apparatus to facilitate the measurement of the amount of scattered electrons collected by an anti-fogging baffle arrangement are provided. For some embodiments, by affixing a lead to an electrically isolated (floating) portion of the baffle arrangement, the amount of scattered electrons collected thereby may be read out, for example, as a current signal. Thus, for such embodiments, the baffle arrangement may double as a detector, allowing an image of surface (e.g., a mask or substrate surface) to be generated.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.