High fill ratio silicon spatial light modulator
US7522330B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 5, 2006 |
| Grant date | Apr 21, 2009 |
| Priority date | — |
| Expiry date | Jul 9, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/008
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical deflection device for a display application. The optical deflection device includes a semiconductor substrate including an upper surface region and one or more electrode devices provided overlying the upper surface region. The optical deflection device also includes a hinge device including a silicon material and coupled to the upper surface region. The optical deflection device further includes a spacing defined between the upper surface region and the hinge device and a mirror structure including a post portion coupled to the hinge device and a mirror plate portion coupled to the post portion and overlying the hinge device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.