Inventor · Cupertino, CA, US

Ye Wang

37Patents
6h-index
55Co-inventors
72Inventor score

Filing activity: Jan 20, 2000 → Apr 12, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US7939990B2 Thin-film bulk acoustic resonators having perforated bodies that provide reduced susceptibility to process-induced lateral dimension variations Electricity 17 Active
US7955885B1 Methods of forming packaged micro-electromechanical devices Performing Operations; Transporting 16 Active
US6451252B1 Odor removal system and method having ozone and non-thermal plasma treatment Chemistry; Metallurgy 15 Expired
US7834524B2 Micro-electromechanical devices having variable capacitors therein that compensate for temperature-induced frequency drift in acoustic resonators Emerging Cross-Sectional Technologies 8 Active
US8638178B1 Methods of testing packaged thin-film piezoelectric-on-semiconductor microelectromechanical resonators having hermetic seals Electricity 7 Active
US8111499B2 System and method of sensing and removing residual charge from a processed wafer Electricity 7 Active
US10526701B2 Multi-cycle ALD process for film uniformity and thickness profile modulation Chemistry; Metallurgy 6 Active
US8610336B1 Microelectromechanical resonators having resistive heating elements therein configured to provide frequency tuning through convective heating of resonator bodies Electricity 6 Active
US8106724B1 Thin-film bulk acoustic resonators having perforated resonator body supports that enhance quality factor Electricity 6 Active
US9269678B2 Bond pad structure and method of manufacturing the same Electricity 3 Active
US7863697B2 Method and apparatus for MEMS oscillator Electricity 3 Active
US8608851B2 Plasma confinement apparatus, and method for confining a plasma Electricity 3 Active
US8361331B2 MEMS mirror system for laser printing applications Physics 2 Active
US9824828B2 High specific capacitance and high power density of printed flexible micro-supercapacitors Emerging Cross-Sectional Technologies 2 Active
US8314984B2 Method and system for optical MEMS with flexible landing structures Emerging Cross-Sectional Technologies 2 Active
US8159740B2 Fabrication of a high fill ratio silicon spatial light modulator Physics 1 Active
US7898561B2 MEMS mirror system for laser printing applications Physics 1 Active
US8530258B2 Method and apparatus for MEMS oscillator Electricity 1 Active
US8105736B2 Method and system for overlay correction during photolithography Physics 1 Active
US7453624B2 Projection display system including a high fill ratio silicon spatial light modulator Physics 1 Active
US9691703B2 Bond pad structure with dual passivation layers Electricity 1 Active
US7675670B2 Fabrication of a high fill ratio silicon spatial light modulator Physics 1 Active
US11522725B2 Reducing amount of helper data in silicon physical unclonable functions via lossy compression without production-time error characterization Electricity 0 Active
US10187965B2 Plasma confinement apparatus, and method for confining a plasma Electricity 0 Active
US7522330B2 High fill ratio silicon spatial light modulator Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.