Apparatus for evaluating semiconductor wafer
US7525327B2 · kind B2 · utility
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38Claims
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Key dates
| Filing date | Jun 13, 2005 |
| Grant date | Apr 28, 2009 |
| Priority date | — |
| Expiry date | Aug 31, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/06783
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus for evaluating an electric characteristic of a semiconductor wafer including, at least, a wafer cassette section on which a wafer cassette for storing the semiconductor wafer that is an object to be evaluated is placed, a wafer pretreatment section for pretreating the semiconductor wafer in order to evaluate the electric characteristic thereof, a mercury probe section for evaluating the electric characteristic of the semiconductor wafer by using a mercury probe, and an automatic transport part for transporting the semiconductor wafer to each of the sections.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.