Inventor · Annaka City, JP

Tsuyoshi Ohtsuki

19Patents
1h-index
16Co-inventors
51Inventor score

Filing activity: Oct 16, 2000 → May 26, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US8575722B2 Semiconductor substrate having multilayer film and method to reuse the substrate by delaminating a porous layer Electricity 2 Active
US8043871B2 Method for forming oxide film on silicon wafer Electricity 1 Active
US8551246B2 Method for evaluating oxide dielectric breakdown voltage of a silicon single crystal wafer Emerging Cross-Sectional Technologies 0 Active
US12183641B2 Method for evaluating semiconductor substrate Electricity 0 Active
US12387126B2 Method for producing semiconductor apparatus for quantum computer Electricity 0 Active
US9780006B2 Method for evaluating SOI substrate Electricity 0 Active
US12308225B2 Method for forming thermal oxide film on semiconductor substrate Electricity 0 Active
US10886129B2 Method for manufacturing semiconductor device and method for evaluating semiconductor device Emerging Cross-Sectional Technologies 0 Active
US9748151B2 Method for evaluating semiconductor substrate Physics 0 Active
US12368107B2 Method for producing semiconductor apparatus and semiconductor apparatus Electricity 0 Active
US11824070B2 Silicon single crystal substrate and silicon epitaxial wafer for solid-state image sensor and solid-state image sensor Electricity 0 Active
US7633305B2 Method for evaluating semiconductor wafer and apparatus for evaluating semiconductor wafer Electricity 0 Expired
US7525327B2 Apparatus for evaluating semiconductor wafer Physics 0 Expired
US6541117B1 Silicon epitaxial wafer and a method for producing it Electricity 0 Expired
US9696368B2 Semiconductor substrate evaluating method, semiconductor substrate for evaluation, and semiconductor device Electricity 0 Active
US8900971B2 Bonded substrate and manufacturing method thereof Electricity 0 Active
US9935021B2 Method for evaluating a semiconductor wafer Electricity 0 Active
US11248306B2 Anodic-oxidation equipment, anodic-oxidation method, and method for producing cathode of anodic-oxidation equipment Chemistry; Metallurgy 0 Active
US8877609B2 Method for manufacturing bonded substrate having an insulator layer in part of bonded substrate Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.