Method and apparatus for simultaneous high-speed acquisition of multiple images
US7528943B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 27, 2005 |
| Grant date | May 5, 2009 |
| Priority date | — |
| Expiry date | Jul 13, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/95607
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and apparatus for simultaneous high-speed inspection and acquisition of multiple data channels is provided. The method and apparatus enables inspecting semiconductor wafers and reticles and comprises converting a single image region into two image sections, reorienting one image into a transposed configuration enabling simultaneous scanning of two inspected object locations with a single sensor, and controlling acquisition parameters for a second image by using information collected from a first image in a feedback arrangement. The design provides a dual-linear or time-delay-integration sensor operating in a split readout configuration mode to simultaneously provide data from two regions of the sensor using two sets of readout circuitry.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.