Interface for testing semiconductors
US7535247B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 18, 2006 |
| Grant date | May 19, 2009 |
| Priority date | — |
| Expiry date | May 7, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2891
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system includes an imaging device suitable for effectively positioning a probe for testing a semiconductor wafer. The system includes an objective lens for sensing the device under test and an imaging device sensing a first video sequence including multiple frames of an overlapping region of the device under test. A video signal is provided to a display including multiple frames of the overlapping region of the device under test. An operator indicating a region of the video signal of devices under test and the system in response presenting an enlarged view of a plurality of different regions of the device under test in a plurality of windows free from user input, where the region and the plurality of different regions are simultaneously displayed on the display.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.