Lens element, lithographic apparatus, device manufacturing method, and device manufactured thereby
US7535644B2 · kind B2 · utility
2Cited by
24References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 12, 2005 |
| Grant date | May 19, 2009 |
| Priority date | — |
| Expiry date | Jan 4, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70275
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A lens element comprises a first face and a second face, where the first face comprises a plurality of concave shaped lens parts. Each concave shaped lens part is arranged to focus a portion of a beam incident on the second face via a liquid on a single flat surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.